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基于ANSYS的新型聚合物石英压电传感器振动性能分析

王南飞 李强 谷宇

王南飞, 李强, 谷宇. 基于ANSYS的新型聚合物石英压电传感器振动性能分析[J]. 工程科学学报, 2017, 39(2): 301-308. doi: 10.13374/j.issn2095-9389.2017.02.019
引用本文: 王南飞, 李强, 谷宇. 基于ANSYS的新型聚合物石英压电传感器振动性能分析[J]. 工程科学学报, 2017, 39(2): 301-308. doi: 10.13374/j.issn2095-9389.2017.02.019
WANG Nan-fei, LI Qiang, GU Yu. Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS[J]. Chinese Journal of Engineering, 2017, 39(2): 301-308. doi: 10.13374/j.issn2095-9389.2017.02.019
Citation: WANG Nan-fei, LI Qiang, GU Yu. Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS[J]. Chinese Journal of Engineering, 2017, 39(2): 301-308. doi: 10.13374/j.issn2095-9389.2017.02.019

基于ANSYS的新型聚合物石英压电传感器振动性能分析

doi: 10.13374/j.issn2095-9389.2017.02.019
基金项目: 

国家高新技术研究发展计划资助项目(2013AA030901)

详细信息
  • 中图分类号: TH89;TH-39

Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS

  • 摘要: 新型聚合物石英压电传感器制备过程中,AT切型石英压电传感器基体的表面粗糙度及其基膜界面化学性质影响聚合物薄膜的生长,导致聚合物薄膜厚度不均匀、表面存在缺陷,使得传感器采集的频率信号不稳定.本文建立了新型聚合物石英压电传感器在考虑薄膜厚度不均、中心缺陷条件下的力学模型,利用ANSYS有限元软件对其进行模态分析,得到复杂条件下传感器振动特性.模态分析结果发现,传感器固有频率值随聚合物薄膜缺陷的半径值增大呈现出从稳定到发散的趋势、随薄膜的厚度值增大呈现出线性增大的趋势.研究结果表明,新型聚合物石英压电传感器的生产应确保薄膜厚度均匀且严格控制中心缺陷半径小于0.5 mm,该结果为制备稳定的新型聚合物石英压电传感器提供了重要依据.
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  • 收稿日期:  2016-04-14

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