卢建红, 焦汉东, 焦树强. 聚二硫二丙烷磺酸钠在二元络合化学镀铜体系中的作用[J]. 工程科学学报, 2017, 39(9): 1380-1385. DOI: 10.13374/j.issn2095-9389.2017.09.011
引用本文: 卢建红, 焦汉东, 焦树强. 聚二硫二丙烷磺酸钠在二元络合化学镀铜体系中的作用[J]. 工程科学学报, 2017, 39(9): 1380-1385. DOI: 10.13374/j.issn2095-9389.2017.09.011
LU Jian-hong, JIAO Han-dong, JIAO Shu-qiang. Effect of sodium 3,3'-dithiodipropane sulfonate in a dual-ligand electroless copper system[J]. Chinese Journal of Engineering, 2017, 39(9): 1380-1385. DOI: 10.13374/j.issn2095-9389.2017.09.011
Citation: LU Jian-hong, JIAO Han-dong, JIAO Shu-qiang. Effect of sodium 3,3'-dithiodipropane sulfonate in a dual-ligand electroless copper system[J]. Chinese Journal of Engineering, 2017, 39(9): 1380-1385. DOI: 10.13374/j.issn2095-9389.2017.09.011

聚二硫二丙烷磺酸钠在二元络合化学镀铜体系中的作用

Effect of sodium 3,3'-dithiodipropane sulfonate in a dual-ligand electroless copper system

  • 摘要: 用电化学方法研究添加剂聚二硫二丙烷磺酸钠(SPS)对乙二胺四乙酸(EDTA)/四羟丙基乙二胺(THPED)二元络合化学镀铜过程的影响,测量体系的混合电位-时间关系,加入SPS后混合电位负移,负移过程较平缓,无突跃现象;采用线性扫描伏安法研究体系,表明SPS促进了阴阳两极的极化,但主要是影响甲醛氧化的阳极极化过程.SPS也因此一定程度上提高了过程的沉积速率.通过扫描电镜、能谱仪和X射线衍射仪对结构的分析,镀层铜纯净度较高,无氧化铜等夹杂,镀层细致平滑,发现SPS有促进(200)晶面择优取向的作用.

     

    Abstract: The process of electroless copper plating in an EDTA/THPED dual-ligand system using sodium 3,3'-dithiodipropane sulfonate (SPS) as an additive was studied by the electrochemical method. The mixed potential of the system was measured as a function of time, and results indicate that addition of SPS gradually shifts the mixed potential toward the negative direction without saltation. The dual-ligand electroless copper system was then tested by linear sweep voltammetry, and SPS is found to accelerate both cathodic and anodic polarization. The additive mainly influences the anodic polarization of the formaldehyde oxidation process and the rate of copper deposition is improved to a certain extent. The surface morphology and texture of the resulting plated copper were also analyzed by scanning electron microscope, energy dispersive spectrometer and X-ray diffraction, and a high-purity product without Cu2O inclusions is confirmed. Moreover, the X-ray diffraction results of the electroless copper layers show that addition of SPS favors the formation of the preferred orientation on the (200) lattice plane.

     

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