Abstract: Radio-frequency(RF) plasma reactors are well suitable to high-rate generation of high pure nanoparticles in vapor synthesis methods.In the synthesis system of TiO₂ nanoparticles with little gas flow which concludes titanium tetrachloride and oxygen,the temperature distribution was computed by solving a second-order partial differential equation by the finite difference method in Matlab.By coupling the temperature distribution with kinetic equations of particle growth,the final average size and the size distribution of TiO₂ nanoparticles were obtained by calculating along each gas streamline.The simulation results computed at different input concentrations agree with experimental data,on the whole.As the assumptions of the gas flow and concentration distribution in the system are sample and without considering the effect of mass transportation on the final particle size in the growth process,the proposed model deserves to be further improved.