基于Depth-YOLO的半导体键合引线缺陷检测算法

Depth-YOLO-based defect detection algorithm for semiconductor bonding leads

  • 摘要: 引线键合作为集成电路封装环节的关键步骤,其作用是将不同元器件和芯片相互连接,确保电路的正常工作,其质量检测关乎产品良率。针对现有键合引线缺陷检测方法检测精度和检测效率较低的问题,本文提出一种新的缺陷检测模型:Depth-YOLO。首先,该模型重建了YOLOv8模型的输入端,使模型能够处理输入图像的深度信息。其次,提出一种输入特征增强模块,增强模型对引线深度信息和纹理特征的提取能力。随后,用C2f_Faster模块替换原YOLOv8主干网络的C2f模块,降低模型参数量,减少计算冗余。接着,提出一种融合注意力机制(MDFA),增强模型对密集复杂不规则缺陷的特征提取能力,提升检测精度。最后,用WIoU代替原YOLOv8的损失函数CIoU,提高模型对目标检测框的判断准确性,加快收敛速度。针对目前相关研究领域没有键合引线公开数据集的问题,我们自制了键合引线深度图像数据集DepthBondingWire。在自制数据集的实验结果表明,Depth-YOLO模型相比于原YOLOv8模型mAP@0.5提升了7.2%,达到了98.6%。与其他主流目标检测模型相比具有较高的检测精度。本研究提出的方法可有效实现半导体键合引线高精度自动化检测,并可以辐射到集成电路其他关键工艺的缺陷检测。

     

    Abstract: Wire bonding, as a critical step in integrated circuit packaging, serves to interconnect various components and chips to ensure proper circuit functionality. Its quality inspection directly impacts product yield rates. To address the issues of low detection accuracy and efficiency in existing bond wire defect detection methods, this paper proposes a novel defect detection model: Depth-YOLO.First, the model reconstructs the input terminal of the YOLOv8 architecture, enabling it to process depth information from input images. Second, an input feature enhancement module is proposed to strengthen the model's capability in extracting depth information and texture features of bonding wires. Subsequently, the C2f module in the original YOLOv8 backbone network is replaced with a C2f_Faster module, effectively reducing model parameters and computational redundancy.Furthermore, a Multi-Dimensional Feature Attention (MDFA) mechanism is introduced to enhance the model's feature extraction capability for dense, complex, and irregular defects, thereby improving detection accuracy. Finally, the original CIoU loss function in YOLOv8 is replaced with WIoU to enhance the model's bounding box judgment accuracy and accelerate convergence speed.To address the lack of publicly available bond wire datasets in related research fields, we developed a specialized depth image dataset named DepthBondingWire. Experimental results on this custom dataset demonstrate that the Depth-YOLO model achieves a 7.2% improvement in mAP@0.5 compared to the original YOLOv8, reaching 98.6%. The proposed model shows superior detection accuracy compared with other mainstream object detection models.This methodology effectively enables high-precision automated inspection of semiconductor bond wires and can be extended to defect detection in other critical integrated circuit manufacturing processes. The DepthBondingWire dataset and experimental validation confirm that the proposed approach achieves 98.6% mAP@0.5, outperforming original YOLOv8 by 7.2% while maintaining advantages over other mainstream detection models. This research provides an effective solution for automated precision inspection in semiconductor bonding processes, with potential applications extending to quality control across various integrated circuit manufacturing stages.

     

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