卢燕平, 张长鑫, 赵海滨, 韩文礼. 钢表面化学气相沉积钽涂层的研究[J]. 工程科学学报, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
引用本文: 卢燕平, 张长鑫, 赵海滨, 韩文礼. 钢表面化学气相沉积钽涂层的研究[J]. 工程科学学报, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011
Citation: Lu Yanping, Zhang Zhangxin, Zhao Haibin, Han Wenli. Studg of Tantalum Coating on Steel by Chemical Vapour Deposition[J]. Chinese Journal of Engineering, 1984, 6(2): 118-124. DOI: 10.13374/j.issn1001-053x.1984.02.011

钢表面化学气相沉积钽涂层的研究

Studg of Tantalum Coating on Steel by Chemical Vapour Deposition

  • 摘要: 本文研究了Ta-Cl2-H2体系在45钢表面化学气相沉积钽涂层工艺,讨论了钽的沉积速度与温度、五氯化钽和氢气压力之间的关系。本文还扼要介绍了用金相、x射线衍射和电子探针分析等方法测定涂层结构的研究结果。腐蚀试验结果表明,涂层样品在37.7%HCl,63%H2SO4介质中具有很高的抗蚀能力,其腐蚀速率比未涂层的可降低2~3个数量级。

     

    Abstract: A tantalum coating process on 45 steel by chemical vapour deposition was studied in the Ta-Cl2-H2 system.Deposit rate of tantalum associated with temperature and partial pressure of TaCl5 and H2 was investigeted.Coating stru-ctures examined by metallogaphy,x-ray diffraction and electroprobe analysis methods ware also described.Corrosion experimental results in 37.7% HCl and 63% H2SO4 Solution show that corrosion rate of the coated samples is 2-3 ord ers lower then that of uncoated samples.

     

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