磁控溅射非晶Fe-Cr-Ni-C薄膜的耐蚀性能

Corrosion Behaviour of Amorphous Fe-Cr-Ni-C Alloys Synthesized by Magnetron Sputter Deposition

摘要: 以碳为阻晶元素,利用磁控溅射方法获得非晶不锈钢薄膜。用X-射线衍射、透射电镜和动电位极化方法研究了碳含量与薄膜结构及耐蚀性的关系,并用AES和XPS分析了钝化膜成分。结果表明;碳含量对薄膜的结构和耐蚀性有显著影响;当碳含量超过6.2wt%时,薄膜转变为非晶态结构。

Abstract: The results of a study of the effect of increasing carbon concentration on the crystalline-to-amorphous transition and corrosion resistance in high rate sputter-deposited 304ss-carbon alloys are reported. Charaterization using X-ray diffraction, transmission electron microscopy and auger electron microprobe analysis showed that the amorphous state was formed at carbon concentration greater than 6.2wt%.