王建军, 吕反修, 杨保雄. 聚乙烯促进低压气相金刚石成核的机理[J]. 工程科学学报, 1994, 16(2): 135-138,143. DOI: 10.13374/j.issn1001-053x.1994.02.008
引用本文: 王建军, 吕反修, 杨保雄. 聚乙烯促进低压气相金刚石成核的机理[J]. 工程科学学报, 1994, 16(2): 135-138,143. DOI: 10.13374/j.issn1001-053x.1994.02.008
Wang Jianjun, Lu Fanxiu, Yang Baoxiong. Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase[J]. Chinese Journal of Engineering, 1994, 16(2): 135-138,143. DOI: 10.13374/j.issn1001-053x.1994.02.008
Citation: Wang Jianjun, Lu Fanxiu, Yang Baoxiong. Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase[J]. Chinese Journal of Engineering, 1994, 16(2): 135-138,143. DOI: 10.13374/j.issn1001-053x.1994.02.008

聚乙烯促进低压气相金刚石成核的机理

Effect of Polyethylene on Low Pressure Diamond Growth from the Vapour Phase

  • 摘要: 研究了在微波等离子体化学气相沉积(MPCVD)条件下,聚乙烯对金刚石在单晶硅衬底上形核的影响.发现预先涂覆在硅衬底的聚乙烯显著地促进了金刚石的形核;提出了聚乙烯促进金刚石形核的机理和具有SP3杂化结构的含碳活化粒子过饱和度概念及其促进金刚石形核的观点.

     

    Abstract: Effect of polyethylene on low pressure diamond growth from the vapour phase was studied. It was found that diamond nucleation on polyethylene coated, un-polished single crystal silicon substrate was greatly enhanced. The mechanism of the observed enhancement and a new concept of the super-saturation of carbonaceous radicales with the SP3 hybridstructure which enhance the nucleation of diamond film have been proposed.

     

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