巨磁电阻自旋阀多层膜的结构和磁性

Microstructure and Magnetic Properties of Spin Valve Multilayer with Giant Magnetoresistance

摘要: 用磁控溅射镀膜方法，制成了巨磁电阻自族间多层膜Ta/NiFe/Cu/NiFe/FeMn/Ta.它具有优良的特性.其室温磁电阻比率MR＞2%，自由层矫顽力H_c1<160A/m，自由层零磁场漂H_f<800A/m和钉扎层交换场H_ex≈20×10³ A/m.作为新型磁功能材料，它满足高灵敏磁性传感器和硬盘读出头的要求.对多层膜制备的方法也作了系统研究，并讨论了缓冲层和钉扎层的制备工艺和微结构对磁性能的影响.

Abstract: The spin valve multilayer, consisting of Ta/NiFe/Cu/NiFe/FeMn/Ta, with giant magnetoresistance(GMR) has been successfully produced by magnetron sputtering. It is Possessed of good properties. The magnetoresistance ratio MR>2% at room temperature, the coereivity of free layer H_cl< 160 A / m, shift field H_f < 800 A / m and the biasing exchange field H_ex≈20·10³ A / m. As a new magnetic functional malarial, these properties can meet the requirement for preparation of magnetic field sensors with high sensitivity, for example in magnetic recording magnetoresistance read head.