黄天斌, 刘敬明, 唐伟忠, 钟国仿, 蒋政, 吕反修. 大面积金刚石膜的均匀沉积[J]. 工程科学学报, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
引用本文: 黄天斌, 刘敬明, 唐伟忠, 钟国仿, 蒋政, 吕反修. 大面积金刚石膜的均匀沉积[J]. 工程科学学报, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
shu
HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
Citation: HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
shu

大面积金刚石膜的均匀沉积

Uniformity of Large Area Diamond Films

    摘要
  • 摘要: 研究了大面积金刚石膜沉积过程中的均匀性问题和金刚石膜质量的均匀性问题.研究表明:用于生长金刚石膜的大面积磁旋转等离子体电弧是均匀的,能使气体混合均匀:金刚石膜在形核阶段是均匀的;金刚石膜在生长阶段是均匀的,有利于提高成膜几率:沉积后的金刚石膜的质量是均匀的.大面积磁控长通道等离子矩能生长均匀的金刚石膜,可用于金刚石膜的研究和工业生产,

     

    Abstract: The uniformity of large area diamond filrns in deposition process and quality of diamond films is researched. The results show tha the DC arc used for deposition of diamond films is uniform. Diaxnond films are uniform in the process of nucleation and the growh. The quslity of large area diamond films is uniform.

     

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