LIU Jingming, JIANG Zheng, ZHANG Hengda, LV Fanxiu, TANG Weizhong. Thermo-Chemical Polishing of Large Area CVD Diamond Films[J]. Chinese Journal of Engineering, 2001, 23(1): 42-44. DOI: 10.13374/j.issn1001-053x.2001.01.038
Citation: LIU Jingming, JIANG Zheng, ZHANG Hengda, LV Fanxiu, TANG Weizhong. Thermo-Chemical Polishing of Large Area CVD Diamond Films[J]. Chinese Journal of Engineering, 2001, 23(1): 42-44. DOI: 10.13374/j.issn1001-053x.2001.01.038
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Thermo-Chemical Polishing of Large Area CVD Diamond Films

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  • The first domestic thermo-chemical polishing apparatus is setup. Three φl10 mm in diameter diamond films can be polished simultaneously at 10-3Pa from 750℃ to 100℃, with the polishing rate increasing with increasing temperature. The results of polishing at 980℃ showed that polishing of CVD diamond films is very efficient. Thermo-chemical polishing mechanism is based on the transformation of diamond into graphite and the atomic dissolution of carbon into a hot metal.
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