ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. DOI: 10.13374/j.issn1001-053x.2002.04.011
Citation:
ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. DOI: 10.13374/j.issn1001-053x.2002.04.011
ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. DOI: 10.13374/j.issn1001-053x.2002.04.011
Citation:
ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. DOI: 10.13374/j.issn1001-053x.2002.04.011
The defects in large area diamond films prepared by DC arc plasma jet CVD method are researched. The defects in diamond films are investigated, including the surface, bulk, boundry defects and the macro-cracks and micro-cracks caused by internal stresses. The results show that the growth parameters often led to defects in diamond films.
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